On optothermally excited parametric oscillations of microbeam resonators. II

Abstract

The present article is the second part of the work devoted to investigation of the nonlinear dynamics of parametrically excited flexural vibrations of a clamped-clamped microbeam — the basic sensitive element of a promising class of microsensors of various physical quantities — under laser thermooptical action in the form of periodically generated pulses acting on a certain part of the surface of the beam element. The fundamental technical feasibility of laser generation of parametric oscillations of high-Q microresonators without the implementation of scenarios for the loss of elastic stability of the sensitive element or its unacceptable heating is shown. The nature of the zone of the main parametric resonance is analyzed analytically. The resonant characteristics of the system are constructed in a geometrically non-linear formulation corresponding to the Bernoulli—Euler beam model.